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1atomic force microscopy 1cross-coupling compensation 1hysteresis 1modeling 1piezoelectric devices 1raster scanning 1repetitive control 1tracking control

1Aphale, Sumeet S. 1Chen, Zhiyong 1Fleming, Andrew J. 1Gu, Guoying 1Hu, Bo 1Huang, Xiang 1Wu, Dongrui 1Xu, Bowen 1Yong, Yuen K. 1Yuan, Ye 1Zhang, Hai-Tao 1Zhu, LiMin

Date

12018 12022

Facets

1atomic force microscopy 1cross-coupling compensation 1hysteresis 1modeling 1piezoelectric devices 1raster scanning 1repetitive control 1tracking control

1Aphale, Sumeet S. 1Chen, Zhiyong 1Fleming, Andrew J. 1Gu, Guoying 1Hu, Bo 1Huang, Xiang 1Wu, Dongrui 1Xu, Bowen 1Yong, Yuen K. 1Yuan, Ye 1Zhang, Hai-Tao 1Zhu, LiMin

Date

12018 12022

Title
Creator
Date

High performance raster scanning of atomic force microscopy using Model-free Repetitive Control

- Li, Linlin, Fleming, Andrew J., Yong, Yuen K., Aphale, Sumeet S., Zhu, LiMin

Creator: Li, Linlin , Fleming, Andrew J. , Yong, Yuen K. , Aphale, Sumeet S. , Zhu, LiMin
Resource Type: journal article
Date: 2022

Distributed Hammerstein Modeling for Cross-Coupling Effect of Multiaxis Piezoelectric Micropositioning Stages

- Zhang, Hai-Tao, Hu, Bo, Li, Linlin, Chen, Zhiyong, Wu, Dongrui, Xu, Bowen, Huang, Xiang, Gu, Guoying, Yuan, Ye

Creator: Zhang, Hai-Tao , Hu, Bo , Li, Linlin , Chen, Zhiyong , Wu, Dongrui , Xu, Bowen , Huang, Xiang , Gu, Guoying , Yuan, Ye
Resource Type: journal article
Date: 2018

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